학술지명: Journal of Manufacturing Processes
발행국가: 미국
발표일자: 2020년 2월
SCI여부 : SCIE
원문Link: https://www.sciencedirect.com/science/article/pii/S152661251930427X?casa_token=ucmQ2_-K83IAAAAA:_X9xHqMJ2EJYjdbps0qUYOwuJGcvjUkZ2gvCjbwKWw6XcDAzF0wesQgsG2SAle_eudTPvz2mBxKU
제목: Micro-structuring silicon compound ceramics using nanosecond pulsed laser assisted by hydrothermal reaction
저자: 정형균(삼성전자) 주종남(서울대학교) 권귀감(서울대학교) 송기영(샤프정밀)
내용: 레이저 가공이 어려운 세라믹에 수화반응을 이용하여 레이져 가공을 성공시킴.
초록Abstract: In the machining of silicon compound ceramic materials via laser beam, processing in water has been found to enhance machining quality, while processing in air has limitations such as the generation of a recast layer, heat affected zone, and thermal crack. However, few studies have investigated the effects of water on the ablation rate of silicon compound ceramics. In this research, the ablation behavior and machining principles of the laser beam machining of silicon compound ceramics in water are investigated. The research concluded that the increase in temperature induced by laser irradiation promotes hydrothermal reaction between the silicon compound ceramics and water. The hydrothermal reaction assists in the removal of the oxide layer at the machined area and enhances the efficiency of the process in water. The effects of water on ablation are confirmed for various machining parameters such as the flow rate of sprayed water on the workpiece and laser conditions. Finally, the various micro-structures were fabricated on the silicon compound ceramics to evaluate the processability.
|
기술자료 
HOME > 기술자료> 관련논문 
